Ziger, David: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

1

Generalized characteristic model for lithography: application to negative chemically amplified resists

Ziger, David H.

Journal:

Optical Engineering

Year:

1992

Language:

english

File:

PDF, 349 KB

english, 1992

2

SPIE Proceedings [SPIE Advances in Resist Technology and Processing VIII - San Jose, United States (Monday 4 March 1991)] Advances in Resist Technology and Processing VIII - Generalized characteristic model for lithography: application to negative chemically amplified resists

Ziger, David H., Mack, Chris A., Distasio, Romelia G., Ito, Hiroshi

Year:

1991

Language:

english

File:

PDF, 454 KB

english, 1991

3

Understanding optical end of line metrology

Journal:

Optical Engineering

Year:

2000

Language:

english

File:

PDF, 265 KB

english, 2000

4

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XII - Yokohama, Japan (Wednesday 13 April 2005)] Photomask and Next-Generation Lithography Mask Technology XII - 65nm mask CD qualification on critical features through simulation based lithography verification

van Adrichem, Paul J. M., Valadez, John, Ziger, David, Gerold, Dave, Komuro, Masanori

Year:

2005

Language:

english

File:

PDF, 143 KB

english, 2005

5

Generalized approach toward modeling resist performance

David H. Ziger, Chris A. Mack

Journal:

Year:

1991

Language:

english

File:

PDF, 1.02 MB

english, 1991

6

Solubilities of hydrocarbon solids in supercritical fluids. The augmented van der Waals treatment

Johnston, Keith P., Ziger, David H., Eckert, Charles A.

Journal:

Industrial & Engineering Chemistry Fundamentals

Year:

1982

Language:

english

File:

PDF, 775 KB

english, 1982

7

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 6 October 2008)] Photomask Technology 2008 - Extracting mask error function from intensity slices

Ziger, David, Kawahira, Hiroichi, Zurbrick, Larry S.

Year:

2008

Language:

english

File:

PDF, 1.13 MB

english, 2008

8

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Linesize effects on UV reflectance spectra

Ziger, David H., Adams, Thomas E., Garofalo, Joseph G., Jones, Susan K.

Year:

1996

Language:

english

File:

PDF, 512 KB

english, 1996

9

SPIE Proceedings [SPIE Optical/Laser Microlithography IV - San Jose, United States (Wednesday 6 March 1991)] Optical/Laser Microlithography IV - Use of antireflective coatings in deep-UV lithography

Sethi, Satyendra S., Distasio, Romelia G., Ziger, David H., Lamb III, James E., Flaim, Tony D., Pol, Victor

Year:

1991

Language:

english

File:

PDF, 569 KB

english, 1991

10

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Linear alignment correction algorithm for deep-submicron lithography

Ziger, David H., Leroux, Pierre, Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 856 KB

english, 2002

11

Correlation and prediction of solid-supercritical fluid phase equilibriums

Ziger, David H., Eckert, Charles A.

Journal:

Industrial & Engineering Chemistry Process Design and Development

Year:

1983

Language:

english

File:

PDF, 769 KB

english, 1983

12

Selective one-step Chemical Etching of the Silicon Nitride/Silicon PBL stack for 0.5μm device Fabrication

Ziger, David, Vitkavage, Susan, Oberdorfer, Charles, Eisenberg, Juli, Hughes, Michael

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 369 KB

english, 1995

13

Simple high-pressure magnetic pump

Ziger, David H.

Journal:

Review of Scientific Instruments

Year:

1982

Language:

english

File:

PDF, 387 KB

english, 1982

14

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Metrology, Inspection, and Process Control for Microlithography XIII - Understanding optical end of line metrology

Ziger, David H., Leroux, Pierre, Singh, Bhanwar

Year:

1999

Language:

english

File:

PDF, 1.83 MB

english, 1999

15

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Design for Manufacturability through Design-Process Integration - Intelligent visualization of lithography violations

Ziger, David, Wong, Alfred K. K., Singh, Vivek K.

Year:

2007

Language:

english

File:

PDF, 221 KB

english, 2007

16

Kinetic study of ammonia-catalyzed image reversal in positive photoresist

Wolk, Gary L., Ziger, David H.

Journal:

Industrial & Engineering Chemistry Research

Year:

1991

Language:

english

File:

PDF, 892 KB

english, 1991

17

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Metrology, Inspection, and Process Control for Microlithography XI - Complementary alignment metrology: a visual technique for alignment monitoring

Ziger, David H., Leroux, Pierre, Jones, Susan K.

Year:

1997

Language:

english

File:

PDF, 616 KB

english, 1997

18

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - A new methodology for quantifying OPC recipe accuracy

Ziger, David, Weed, J. Tracy, Martin, Patrick M., Gerold, Dave, King, Charles, Amoroso, Frank, Tuttle, Joshua, Lugg, Robert

Year:

2005

Language:

english

File:

PDF, 378 KB

english, 2005

19

SPIE Proceedings [SPIE Micro - DL tentative - San Jose, CA (Friday 1 March 1991)] Integrated Circuit Metrology, Inspection, and Process Control V - Resist tracking: a lithographic diagnostic tool

Takemoto, Clifford H., Ziger, David H., Connor, William, Distasio, Romelia G., Arnold, William H.

Year:

1991

Language:

english

File:

PDF, 366 KB

english, 1991

20

SPIE Proceedings [SPIE OE/LASE '94 - Los Angeles, CA (Sunday 23 January 1994)] Ultrafast Phenomena in Semiconductors - Damping of charge oscillations in double-well structures by the Coulomb interaction

Ziger, Mihael, Poetz, Walter, Kocevar, P., Ferry, David K., van Driel, Henry M.

Year:

1994

Language:

english

File:

PDF, 857 KB

english, 1994

21

In situ capacitance studies of thin polymer films during compressed fluid extraction

Ziger, David H.

Journal:

Journal of Materials Research

Year:

1987

Language:

english

File:

PDF, 1.06 MB

english, 1987

22

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Swing curve prediction from reflectance spectra: a new method to predict optimal resist thicknesses and compare processes

Ziger, David H., Smith, Bruce W.

Year:

2004

Language:

english

File:

PDF, 289 KB

english, 2004

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@1delivery.pm

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски